Ratan, S.; Kumar, C.; Kumar, A.; Jarwal, D.K.; Mishra, A.K.; Upadhyay, R.K.; Singh, A.P.; Jit, S.
(Institution of Engineering and Technology, 2020-08-05)
This Letter reports the high gas response for hydrogen gas (H2) in Pd/TiO2/Si/Al based metal-oxide semiconductor (MOS) sensor. Titanium oxide (TiO2) thin film deposited on the p-type silicon (Si) substrate is used as the ...